AlN MEMS filters with extremely high bandwidth widening capability
نویسندگان
چکیده
منابع مشابه
Hybrid Ultra-Compact 4th Order Band-Pass Filters Based On Piezoelectric AlN Contour-Mode MEMS Resonators
This work reports on the design, fabrication and testing of a new class of hybrid (filter design using combined electrical and mechanical coupling techniques) ultra-compact (800×120 μm) 4th order band-pass filters based on piezoelectric Aluminum Nitride (AlN) contour-mode microelectromechanical (MEM) resonators. The demonstrated 110 MHz filter shows a low insertion loss of 5.2 dB in air, a high...
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ژورنال
عنوان ژورنال: Microsystems & Nanoengineering
سال: 2020
ISSN: 2055-7434
DOI: 10.1038/s41378-020-00183-5